COBRA Semicon Busch Vacuum Pumps

COBRA Semicon dry screw vacuum pumps are extremely efficient when used in highly demanding processes such as semiconductor, solar module and flat screen production, and in numerous industrial coating applications.

COBRA Semicon Busch Vacuum Pump

COBRA Semicon Dry Screw Vacuum Pumps

  • Ultimate pressure: 0.001 - 0.03 hPa(mbar)
  • Nominal pumping speed 50 Hz: 70 - 7385 m³/h
  • Nominal pumping speed 60 Hz: 85 - 7385 m³/h

COBRA Semicon dry screw vacuum pumps are extremely efficient when used in highly demanding processes such as semiconductor, solar module and flat screen production, and in numerous industrial coating applications.

Efficient and reliable
Equipped with high-efficiency motors, COBRA Semicon screw vacuum pumps offer excellent energy savings potential. The simple design incorporates proven Busch screw profiles (optionally with an additional directly flange-mounted Roots vacuum pump), making the COBRA Semicon an extremely powerful, reliable and low-maintenance vacuum generator.

Application-orientated
COBRA Semicon screw vacuum pumps are available in a wide variety of sizes and versions, permitting a perfect match to any process. Their compact construction simplifies installation, even when space is limited. Featuring the highest pumping speed in their class, these pumps offer the largest throughputs (even with hydrogen) and extensive tolerance to particles.

COBRA DS Dry Screw Vacuum Pumps

The Industrial Standard, Gas-Tight

  • COBRA DS 0080 / 0160 G
  • COBRA DS 0600 E
  • COBRA DS 0700 – 2000 G
  • COBRA DS 2610 / 3010 E
  • COBRA DS 5161 / 9161 A
  • COBRA DS 8162 / 8163 A/E

COBRA BA Dry Screw Vacuum Pumps

Gas-Tight, Flying Bearing System, Air Cooled

COBRA BA 0100 C – 85 m³/h, 0.01 hPa (mbar)

COBRA BC Dry Screw Vacuum Pumps

Gas-Tight, Flying Bearing System, Water-Cooled

  • COBRA BC 0100 / 0200 F
  • COBRA BC 0100 / 0200 F Premium Efficiency
  • COBRA BC 0101 F
  • COBRA BC 0101 F Premium Efficiency
  • COBRA BC 0101 G
  • COBRA BC 0600 F